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Fully automated computer controlled imprinting cycles
Graphical data logging
Max temperature 250°C
Max pressure 70 bar - but normally used at around 20 Bar
Feature sizes down to 20 nm
Substrate sizes up to 65 mm
Vistec VB6 UHR EWF
Vistec EBPG HR 100
Nanoimprint Lithography
Copyright of Kelvin Nanotechnology Ltd, Rankine Building, Oakfield Avenue, Glasgow G12 8LT
T: +44(0)141 330 4869 F: +44(0)141 330 3726 E:
enquiries@kelvinnanotechnology.com
Company No. 173061 (Scotland)